Dinesh P. Mital, Eam Khwang Teoh, I. N. Yong. A Robotic Vision System With Artificial Intelligence For Automatic Wafer Inspection. In IEEE International Workshop on Intelligent Robots and Systems '88, Proceedings. IROS 1988, Tokyo, Japan, October 31 - November 2, 1988. pages 289-295, IEEE, 1988. [doi]
Abstract is missing.