Chuichi Miyazaki, Haruo Shimamoto, Toshihide Uematsu, Yoshiyuki Abe, Kosuke Kitaichi, Tadahiro Morifuji, Shoji Yasunaga. Development of high accuracy wafer thinning and pickup technology for thin wafer. In IEEE International Conference on 3D System Integration, 3DIC 2010, Munich, Germany, 16-18 November 2010. pages 1-4, IEEE, 2010. [doi]
Abstract is missing.