Robert Modlinski, Ann Witvrouw, Petar Ratchev, A. Jourdain, Veerle Simons, H. A. C. Tilmans, Jaap M. J. den Toonder, R. Puers, Ingrid De Wolf. Creep as a reliability problem in MEMS. Microelectronics Reliability, 44(9-11):1733-1738, 2004. [doi]
@article{ModlinskiWRJSTTPW04,
title = {Creep as a reliability problem in MEMS},
author = {Robert Modlinski and Ann Witvrouw and Petar Ratchev and A. Jourdain and Veerle Simons and H. A. C. Tilmans and Jaap M. J. den Toonder and R. Puers and Ingrid De Wolf},
year = {2004},
doi = {10.1016/j.microrel.2004.07.066},
url = {http://dx.doi.org/10.1016/j.microrel.2004.07.066},
researchr = {https://researchr.org/publication/ModlinskiWRJSTTPW04},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {44},
number = {9-11},
pages = {1733-1738},
}