Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
Robert Modlinski, Ann Witvrouw, Petar Ratchev, A. Jourdain, Veerle Simons, H. A. C. Tilmans, Jaap M. J. den Toonder, R. Puers, Ingrid De Wolf. Creep as a reliability problem in MEMS. Microelectronics Reliability, 44(9-11):1733-1738, 2004. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: MEMS reliabilityIngrid De Wolf. mr, 43(7):1047-1048, 2003. [doi]
The following publications are possibly variants of this publication: