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Creep as a reliability problem in MEMS

Robert Modlinski, Ann Witvrouw, Petar Ratchev, A. Jourdain, Veerle Simons, H. A. C. Tilmans, Jaap M. J. den Toonder, R. Puers, Ingrid De Wolf. Creep as a reliability problem in MEMS. Microelectronics Reliability, 44(9-11):1733-1738, 2004. [doi]

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