Matthias Mohaupt, Erik Beckert, Thomas Burkhardt, Marcel Hornaff, Christoph Damm, Ramona Eberhardt, Andreas Tünnermann, Hans-Joachim Döring, Klaus Reimer. Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems - 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, Chamonix, France, February 12-15, 2012. Proceedings. Volume 371 of IFIP Advances in Information and Communication Technology, pages 42-50, Springer, 2012. [doi]
@inproceedings{MohauptBBHDETDR12,
title = {Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography},
author = {Matthias Mohaupt and Erik Beckert and Thomas Burkhardt and Marcel Hornaff and Christoph Damm and Ramona Eberhardt and Andreas Tünnermann and Hans-Joachim Döring and Klaus Reimer},
year = {2012},
doi = {10.1007/978-3-642-28163-1_6},
url = {http://dx.doi.org/10.1007/978-3-642-28163-1_6},
researchr = {https://researchr.org/publication/MohauptBBHDETDR12},
cites = {0},
citedby = {0},
pages = {42-50},
booktitle = {Precision Assembly Technologies and Systems - 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, Chamonix, France, February 12-15, 2012. Proceedings},
editor = {Svetan M. Ratchev},
volume = {371},
series = {IFIP Advances in Information and Communication Technology},
publisher = {Springer},
isbn = {978-3-642-28162-4},
}