Matthias Mohaupt, Erik Beckert, Thomas Burkhardt, Marcel Hornaff, Christoph Damm, Ramona Eberhardt, Andreas Tünnermann, Hans-Joachim Döring, Klaus Reimer. Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography. In Svetan M. Ratchev, editor, Precision Assembly Technologies and Systems - 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, Chamonix, France, February 12-15, 2012. Proceedings. Volume 371 of IFIP Advances in Information and Communication Technology, pages 42-50, Springer, 2012. [doi]
Abstract is missing.