On-chip atomic force microscopy: Mechatronic system design and control

S. O. Reza Moheimani, Anthony G. Fowler, Mohammad Maroufi, Michael G. Ruppert. On-chip atomic force microscopy: Mechatronic system design and control. In 2016 American Control Conference, ACC 2016, Boston, MA, USA, July 6-8, 2016. pages 3093, IEEE, 2016. [doi]

Abstract

Abstract is missing.