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Low temperature SnO::2:: films deposited by APCVD

C. Morales, H. Juárez, T. Díaz, Y. Matsumoto, E. Rosendo, G. Garcia, M. Rubin, F. Mora, M. Pacio, A. García. Low temperature SnO::2:: films deposited by APCVD. Microelectronics Journal, 39(3-4):586-588, 2008. [doi]

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C. Morales

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H. Juárez

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T. Díaz

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Y. Matsumoto

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E. Rosendo

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G. Garcia

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M. Rubin

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F. Mora

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M. Pacio

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A. García

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