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Yield Enhancement with Particle Defects Reduction

Kiyoshi Mori, Nam T. Nguyen, Dewey Keeton, Ross Burns. Yield Enhancement with Particle Defects Reduction. In The IEEE International Workshop on Defect and Fault Tolerance in VLSI Systems, October 17-19, 1994, Montréal, Quebec, Canada, Proceedings. pages 246-253, IEEE Computer Society, 1994.

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