A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process

Isao Mori, Yuki Okamoto, Yoshio Mita. A scalable, optically-driven, high-voltage switch for remote MEMS device operation fabricated with a standard CMOS process. IEICE Electronic Express, 14(3):20161174, 2017. [doi]

Abstract

Abstract is missing.