Design of Bimorph Sensor Utilizing Piezoelectric Effect for Wide Range of Mass Measurement

Tomoya Morikawa, Kiyoshi Matsumoto. Design of Bimorph Sensor Utilizing Piezoelectric Effect for Wide Range of Mass Measurement. In IEEE/SICE International Symposium on System Integration, SII 2022, Narvik, Norway, January 9-12, 2022. pages 485-490, IEEE, 2022. [doi]

Abstract

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