Design and analysis of a new piezoelectric MEMS tilt sensor

Paul M. Moubarak, Pinhas Ben-Tzvi. Design and analysis of a new piezoelectric MEMS tilt sensor. In 2011 IEEE International Symposium on Robotic and Sensors Environments, ROSE 2012, Montréal, Canada, September 17-18, 2011. pages 83-88, IEEE, 2011. [doi]

Abstract

Abstract is missing.