Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation

Taufiq Muhammadi, Wookyong Kwon, Duckman Lee, Sangchul Won. Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation. In 9th Asian Control Conference, ASCC 2013, Istanbul, Turkey, June 23-26, 2013. pages 1-6, IEEE, 2013. [doi]

Abstract

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