Application Of Micro Hot Embossing For MEMS Structures

Y. Murakoshi, X. C. Shan, Ryutaro Maeda. Application Of Micro Hot Embossing For MEMS Structures. International Journal of Computational Engineering Science, 4(3):617-620, 2003. [doi]

Authors

Y. Murakoshi

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X. C. Shan

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Ryutaro Maeda

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