Y. Murakoshi, X. C. Shan, Ryutaro Maeda. Application Of Micro Hot Embossing For MEMS Structures. International Journal of Computational Engineering Science, 4(3):617-620, 2003. [doi]
@article{MurakoshiSM03,
title = {Application Of Micro Hot Embossing For MEMS Structures},
author = {Y. Murakoshi and X. C. Shan and Ryutaro Maeda},
year = {2003},
doi = {10.1142/S1465876303001897},
url = {http://dx.doi.org/10.1142/S1465876303001897},
tags = {C++},
researchr = {https://researchr.org/publication/MurakoshiSM03},
cites = {0},
citedby = {0},
journal = {International Journal of Computational Engineering Science},
volume = {4},
number = {3},
pages = {617-620},
}