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Y. Murakoshi, X. C. Shan, Ryutaro Maeda. Application Of Micro Hot Embossing For MEMS Structures. International Journal of Computational Engineering Science, 4(3):617-620, 2003. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot EmbossingX. C. Shan, Ryutaro Maeda, Tsuyoshi Ikehara, Z. F. Wang, C. K. Wong. ijces, 4(3):724-728, 2003. [doi]
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