MEMS reliability modelling methodology: application to wobble micromotor failure analysis - researchr publication authors

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Sylvaine Muratet, Jean-Yves Fourniols, G. Soto-Romero, Aitor Endemaño Isasi, A. Marty, Marc P. Y. Desmulliez. MEMS reliability modelling methodology: application to wobble micromotor failure analysis. Microelectronics Reliability, 43(9-11):1945-1949, 2003. [doi]

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