MEMS reliability modelling methodology: application to wobble micromotor failure analysis

Sylvaine Muratet, Jean-Yves Fourniols, G. Soto-Romero, Aitor EndemaƱo Isasi, A. Marty, Marc P. Y. Desmulliez. MEMS reliability modelling methodology: application to wobble micromotor failure analysis. Microelectronics Reliability, 43(9-11):1945-1949, 2003. [doi]

@article{MuratetFSEMD03,
  title = {MEMS reliability modelling methodology: application to wobble micromotor failure analysis},
  author = {Sylvaine Muratet and Jean-Yves Fourniols and G. Soto-Romero and Aitor EndemaƱo Isasi and A. Marty and Marc P. Y. Desmulliez},
  year = {2003},
  doi = {10.1016/S0026-2714(03)00330-5},
  url = {http://dx.doi.org/10.1016/S0026-2714(03)00330-5},
  tags = {analysis, reliability},
  researchr = {https://researchr.org/publication/MuratetFSEMD03},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {43},
  number = {9-11},
  pages = {1945-1949},
}