MEMS reliability modelling methodology: application to wobble micromotor failure analysis

Sylvaine Muratet, Jean-Yves Fourniols, G. Soto-Romero, Aitor EndemaƱo Isasi, A. Marty, Marc P. Y. Desmulliez. MEMS reliability modelling methodology: application to wobble micromotor failure analysis. Microelectronics Reliability, 43(9-11):1945-1949, 2003. [doi]

Abstract

Abstract is missing.