Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides

Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki. Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Authors

Seyedfakhreddin Nabavi

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Michaël Ménard

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Frederic Nabki

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