Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki. Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]
Abstract is missing.