Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki. Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]
@inproceedings{NabaviMN22,
title = {Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides},
author = {Seyedfakhreddin Nabavi and Michaël Ménard and Frederic Nabki},
year = {2022},
doi = {10.1109/SENSORS52175.2022.9967301},
url = {https://doi.org/10.1109/SENSORS52175.2022.9967301},
researchr = {https://researchr.org/publication/NabaviMN22},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022},
publisher = {IEEE},
isbn = {978-1-6654-8464-0},
}