Electrical modeling of tapered TSV including MOS-Field effect and substrate parasitics: Analysis and application

Amira Nabil, Jose A. Bernardo, Yue Ma, Mohamed Abouelatta, Ahmed Shaker, Latifa Fakri-Bouchet, Hani F. Ragai, Christian Gontrand. Electrical modeling of tapered TSV including MOS-Field effect and substrate parasitics: Analysis and application. Microelectronics Journal, 100:104797, 2020. [doi]

Abstract

Abstract is missing.