William S. Nagel, Kam K. Leang. Design of a dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner with mechanically mitigated cross-coupling. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2017, Munich, Germany, July 3-7, 2017. pages 706-711, IEEE, 2017. [doi]
Abstract is missing.