Cascading Structure Linear Quadratic Tracking Control for Dual-stage Nanopositioning Systems

William S. Nagel, Kam K. Leang. Cascading Structure Linear Quadratic Tracking Control for Dual-stage Nanopositioning Systems. In 2020 American Control Conference, ACC 2020, Denver, CO, USA, July 1-3, 2020. pages 70-75, IEEE, 2020. [doi]

Abstract

Abstract is missing.