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Reliability of polycrystalline silicon thin film resistors

M. Nakabayashi, H. Ohyama, E. Simoen, M. Ikegami, C. Claeys, K. Kobayashi, M. Yoneoka, K. Miyahara. Reliability of polycrystalline silicon thin film resistors. Microelectronics Reliability, 41(9-10):1341-1346, 2001.

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M. Nakabayashi

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H. Ohyama

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E. Simoen

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M. Ikegami

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C. Claeys

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K. Kobayashi

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M. Yoneoka

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K. Miyahara

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