In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM

Masahiro Nakajima, Masaru Takeuchi, Toshio Fukuda, Yasuhisa Hasegawa, Qiang Huang. In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM. In 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015. pages 1-2, IEEE, 2015. [doi]

Abstract

Abstract is missing.