Parameter identification for nanopositioning of a 6-axis maglev stage with moving Lorentz coils

Vu Huy Nguyen, Won-jong Kim. Parameter identification for nanopositioning of a 6-axis maglev stage with moving Lorentz coils. In IEEE International Conference on Advanced Intelligent Mechatronics, AIM 2016, Banff, AB, Canada, July 12-15, 2016. pages 657-662, IEEE, 2016. [doi]

Abstract

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