3 thin film capacitors

Minh Duc Nguyen, Ruud Johannes Antonius Steenwelle, Paul M. te Riele, Jan Matthijn Dekkers, Dave H. A. Blank, Guus Rijnders. 3 thin film capacitors. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 649-652, IEEE, 2009. [doi]

Abstract

Abstract is missing.