Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition

Dong Ni 0004, Panagiotis D. Christofides. Construction of stochastic PDEs for feedback control of surface roughness in thin film deposition. In American Control Conference, ACC 2005, Portland, OR, USA, 8-10 June, 2005. pages 2540-2547, IEEE, 2005. [doi]

Abstract

Abstract is missing.