Electrolessly deposited diffusion barriers for microelectronics - researchr publication authors

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Eugene J. O Sullivan, Alejandro G. Schrott, Milan Paunovic, Carlos J. Sambucetti, Jeffrey R. Marino, Philip J. Bailey, Suryanarayana Kaja, Krystyna W. Semkow. Electrolessly deposited diffusion barriers for microelectronics. IBM Journal of Research and Development, 42(5):607-620, 1998. [doi]

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