Electrolessly deposited diffusion barriers for microelectronics

Eugene J. O Sullivan, Alejandro G. Schrott, Milan Paunovic, Carlos J. Sambucetti, Jeffrey R. Marino, Philip J. Bailey, Suryanarayana Kaja, Krystyna W. Semkow. Electrolessly deposited diffusion barriers for microelectronics. IBM Journal of Research and Development, 42(5):607-620, 1998. [doi]

Abstract

Abstract is missing.