Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate

Hiroyuki Ogata, Kenji Ichijo, Kenji Kondo, Akito Hara. Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate. IEICE Transactions, 96-C(2):285-288, 2013. [doi]

Abstract

Abstract is missing.