Young-Taek Oh, Kyu-Beom Kim, Sang-Hoon Shin, Hahng Sim, Nguyen Van Toan, Takahito Ono, Yunheub Song. Impact of etch angles on cell characteristics in 3D NAND flash memory. Microelectronics Journal, 79:1-6, 2018. [doi]
@article{OhKSSTOS18,
title = {Impact of etch angles on cell characteristics in 3D NAND flash memory},
author = {Young-Taek Oh and Kyu-Beom Kim and Sang-Hoon Shin and Hahng Sim and Nguyen Van Toan and Takahito Ono and Yunheub Song},
year = {2018},
doi = {10.1016/j.mejo.2018.06.009},
url = {https://doi.org/10.1016/j.mejo.2018.06.009},
researchr = {https://researchr.org/publication/OhKSSTOS18},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {79},
pages = {1-6},
}