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Young-Taek Oh, Kyu-Beom Kim, Sang-Hoon Shin, Hahng Sim, Nguyen Van Toan, Takahito Ono, Yunheub Song. Impact of etch angles on cell characteristics in 3D NAND flash memory. Microelectronics Journal, 79:1-6, 2018. [doi]
Abstract is missing.