A Two-Dimensional Integrated Process Simulator: SPIRIT-I

M. Ohgo, Y. Takano, A. Moniwa, S. Yamamoto, Y. Sakai, H. Masuda, H. Sunami. A Two-Dimensional Integrated Process Simulator: SPIRIT-I. IEEE Trans. on CAD of Integrated Circuits and Systems, 6(3):439-445, 1987. [doi]

Abstract

Abstract is missing.