Design and control of 6-DOF high-precision scan stage with gravity canceller - researchr publication authors

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Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki. Design and control of 6-DOF high-precision scan stage with gravity canceller. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 997-1002, IEEE, 2014. [doi]

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