Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki. Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators. In IEEE 14th International Workshop on Advanced Motion Control, AMC 2016, Auckland, New Zealand, April 22-24, 2016. pages 528-532, IEEE, 2016. [doi]
@inproceedings{OhnishiFSSS16,
title = {Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators},
author = {Wataru Ohnishi and Hiroshi Fujimoto and Koichi Sakata and Kazuhiro Suzuki and Kazuaki Saiki},
year = {2016},
doi = {10.1109/AMC.2016.7496404},
url = {https://doi.org/10.1109/AMC.2016.7496404},
researchr = {https://researchr.org/publication/OhnishiFSSS16},
cites = {0},
citedby = {0},
pages = {528-532},
booktitle = {IEEE 14th International Workshop on Advanced Motion Control, AMC 2016, Auckland, New Zealand, April 22-24, 2016},
publisher = {IEEE},
isbn = {978-1-4799-8464-0},
}