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Characterization of Mg Diffusion into HfO::2::/SiO::2::/Si(100) Stacked Structures and Its Impact on Detect State Densities

Akio Ohta, Daisuke Kanme, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki. Characterization of Mg Diffusion into HfO::2::/SiO::2::/Si(100) Stacked Structures and Its Impact on Detect State Densities. IEICE Transactions, 94-C(5):717-723, 2011. [doi]

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