Evaluation of hybrid bonding technology of single-micron pitch with planar structure for 3D interconnection

Masaki Ohyama, Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Toshihisa Nonaka, Yoichi Shinba, Akitsu Shigetou. Evaluation of hybrid bonding technology of single-micron pitch with planar structure for 3D interconnection. Microelectronics Reliability, 59:134-139, 2016. [doi]

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