Masaki Ohyama, Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Toshihisa Nonaka, Yoichi Shinba, Akitsu Shigetou. Evaluation of hybrid bonding technology of single-micron pitch with planar structure for 3D interconnection. Microelectronics Reliability, 59:134-139, 2016. [doi]
Abstract is missing.