A Test Structure to Analyze Electrical CMOSFET Reliabilities between Center and Edge along the Channel Width

Takashi Ohzone, Eiji Ishii, Takayuki Morishita, Kiyotaka Komoku, Toshihiro Matsuda, Hideyuki Iwata. A Test Structure to Analyze Electrical CMOSFET Reliabilities between Center and Edge along the Channel Width. IEICE Transactions, 90-C(2):515-522, 2007. [doi]

Abstract

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