New Algorithm for Overlapping Cell Treatment in Hierarchical CAD Data/Electron Beam Exposure Data Conversion

Tsuneo Okubo, Takashi Watanabe, Kou Wada. New Algorithm for Overlapping Cell Treatment in Hierarchical CAD Data/Electron Beam Exposure Data Conversion. In DAC. pages 321-326, 1990. [doi]

Abstract

Abstract is missing.