A novel geometric resizing technique for data conversion from CAD data to electron beam exposure data

Tsuneo Okubo, Takashi Watanabe, Kou Wada, Kazuyuki Saito. A novel geometric resizing technique for data conversion from CAD data to electron beam exposure data. IEEE Trans. on CAD of Integrated Circuits and Systems, 11(9):1104-1113, 1992. [doi]

Abstract

Abstract is missing.