Arthur C. de Oliveira, Jarno Groenesteijn, Remco J. Wiegerink, Kofi A. A. Makinwa. 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In IEEE International Solid-State Circuits Conference, ISSCC 2021, San Francisco, CA, USA, February 13-22, 2021. pages 84-86, IEEE, 2021. [doi]
Abstract is missing.