A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h

Arthur C. de Oliveira, Sining Pan, Kofi A. A. Makinwa. A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h. In IEEE International Solid-State Circuits Conference, ISSCC 2022, San Francisco, CA, USA, February 20-26, 2022. pages 1-3, IEEE, 2022. [doi]

@inproceedings{OliveiraPM22,
  title = {A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h},
  author = {Arthur C. de Oliveira and Sining Pan and Kofi A. A. Makinwa},
  year = {2022},
  doi = {10.1109/ISSCC42614.2022.9731704},
  url = {https://doi.org/10.1109/ISSCC42614.2022.9731704},
  researchr = {https://researchr.org/publication/OliveiraPM22},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {IEEE International Solid-State Circuits Conference, ISSCC 2022, San Francisco, CA, USA, February 20-26, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-2800-2},
}