A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h

Arthur C. de Oliveira, Sining Pan, Kofi A. A. Makinwa. A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h. In IEEE International Solid-State Circuits Conference, ISSCC 2022, San Francisco, CA, USA, February 20-26, 2022. pages 1-3, IEEE, 2022. [doi]

Abstract

Abstract is missing.