Xiao Chuan Ong, Amanda Willard, Mats Forssell, Aryn Gittis, Gary K. Fedder. A silicon neural probe fabricated using DRIE on bonded thin silicon. In 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2016, Orlando, FL, USA, August 16-20, 2016. pages 4885-4888, IEEE, 2016. [doi]
Abstract is missing.