Embedded memory and ARM Cortex-M0 core using 60-nm C-axis aligned crystalline indium-gallium-zinc oxide FET integrated with 65-nm Si CMOS

Tatsuya Onuki, Wataru Uesugi, Hikaru Tamura, Atsuo Isobe, Yoshinori Ando, Satoru Okamoto, Kiyoshi Kato, T. R. Yew, Chen Bin Lin, J.-Y. Wu, Chi-Chang Shuai, Shao Hui Wu, James Myers, Klaus Doppler, Masahiro Fujita, Shunpei Yamazaki. Embedded memory and ARM Cortex-M0 core using 60-nm C-axis aligned crystalline indium-gallium-zinc oxide FET integrated with 65-nm Si CMOS. In 2016 IEEE Symposium on VLSI Circuits, VLSIC 2016, Honolulu, HI, USA, June 15-17, 2016. pages 1-2, IEEE, 2016. [doi]

Authors

Tatsuya Onuki

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Wataru Uesugi

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Hikaru Tamura

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Atsuo Isobe

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Yoshinori Ando

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Satoru Okamoto

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Kiyoshi Kato

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T. R. Yew

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Chen Bin Lin

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J.-Y. Wu

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Chi-Chang Shuai

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Shao Hui Wu

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James Myers

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Klaus Doppler

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Masahiro Fujita

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Shunpei Yamazaki

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